L G Epitaxy 40,000 SF Semiconductor Fabrication Plant

Santa Clara, California

L G Epitaxy is a provider of silicon epitaxial services.

Howell Electric was selected to provide pre-construction services, electrical engineering assist services, electrical construction, fire alarm systems, and gas monitoring systems for L.G. Epitaxy’s 40,000 sf semiconductor fab.

This facility features: 16,420 sf Class 10 clean room and Class 100 support aisles, multiple phase construction, 7 EPI reactors, 7-250 KW RF generators, 300  KW emergency generator, 300 Ton central plant, 6-60 HP, air handlers, 50 HP cooling tower with chemical treatment system, 70 KW humidification system, 50 HP exhaust scrubber, 7 EPI exhaust scrubbers, acid waist neutralization system, gas storage bunker with 20 gas cabinets, MDA gas monitoring system, and large capacity CDA, VAC, N2, and DDC controls system.

Project Details

  • Architect
    Moore Engineering
  • Engineer
    Moore Engineering
  • Construction
  • Electrical

Special Features

  • Class 10 Laminar Clean Room for Manufacturing
  • 7-EPI Reactors with 250 KW RF Generators
  • 300 Ton Central Plant Cooling System

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