Reaction Technology, Inc.

Santa Clara, California

Reaction Technology is a leading supplier of silicon epitaxy and silicon coatings to the semiconductor and industrial sectors.

Howell Electric was selected to provide pre-construction services, electrical engineering, electrical construction, and fire alarm systems.

This project features: 3,000 Amp service upgrade to operating semiconductor fab that is on round the clock shifts, final service tie-ins were completed in one 18 hour shift, new LPE EPI reactor with 200 KW solid state RF generator, 1 new Gemini 3 dual chamber reactor, 2 new EPI scrubbers, TGO upgrade including complete gas monitoring system, and H6 reclassification.

 

Project Details

  • Architect
    Moore Engineering
  • Engineer
    Moore Engineering/div>


Special Features

  • 3,000 Amp Serivce Upgrade to an Existing Semiconductor Fab
  • Multiple Tool Services and Equipment Fit-up
  • Toxic and Flammable Gas Detection Systems

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